| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystal orientation determination device that can accurately measure a tilting angle of a crystal lattice face with only two-orientation measurement and can accurately measure the tilting angle of the crystal lattice face by eliminating errors caused by position setting of a sample. SOLUTION: The crystal orientation determination device comprises a data processing unit that integrallyψ-rotates an X-ray source, an X-ray detector and aδdriving unit about theψ-rotation axis that is set to be orthogonal to theδ-rotation axis passing a diffraction point along theδ-rotation face including a pencil-like X-ray beam and to be substantially coaxially to the z-axis substantially perpendicular to the inspected face of the crystal as a specimen, sets theδ-rotation face at a predetermined angle, and calculates the tilting angle to theψ-rotation axis of the normal of the lattice face of the crystal based on the read value of theδ-rotation amount for producing a peak output of the X-ray detector when theδ-rotation is performed at the predetermined angle. The crystal orientation determination device also comprises a fixture 33 forλ-rotatably holding a crystal piece for test and attaching the crystal piece 31 for test to a z-driving unit 9 so that theλ-rotation axis becomes parallel with the z-axis. The data processing unit calculates a set error of the z-axis to theψ-axis based on respective calculation values of the tilting angles of the crystal piece 31 for test with respect to two positions different from each other by 180°inλ-rotation. COPYRIGHT: (C)2006,JPO&NCIPI
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