ELECTRICALLY CONDUCTIVE FILM, ALLOY TARGET MATERIAL FOR PROTECTIVE LAYER THEREFOR, AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an electrically conductive film, an alloy target material for a protective layer therefor and a production method therefor. SOLUTION: The electrically conductive film and the alloy target material for a protective film therefor cotains at least: copper (Cu), nickel (Ni) and zinc (Zn), and the content of the copper (Cu) is 50 to 80 wt%, the content of the nickel (Ni) is 5 to 20 wt%, and the content of the zinc (Zn) is 15 to 30 wt%, so that the total weight% of the alloy target material is 100%. COPYRIGHT: (C)2006,JPO&NCIPI