发明名称 |
Electronic device and it's manufacturing method |
摘要 |
A microelectronic device and a method for producing the device can overcome the disadvantages of known electronic devices composed of carbon molecules, and can deliver performance superior to the known devices. An insulated-gate field-effect transistor includes a multi-walled carbon nanotube ( 10 ) having an outer semiconductive carbon nanotube layer ( 1 ) and an inner metallic carbon nanotube layer ( 2 ) that is partially covered by the outer semiconductive carbon nanotube layer ( 1 ). A metal source electrode ( 3 ) and a metal drain electrode ( 5 ) are brought into contact with both ends of the semiconductive carbon nanotube layer ( 1 ) while a metal gate electrode ( 4 ) is brought into contact with the metallic carbon nanotube layer ( 2 ). The space between the semiconductive carbon nanotube layer ( 1 ) and the metallic carbon nanotube layer ( 2 ) is used as a gate insulating layer. Two layers including the outer semiconductive carbon nanotube layer ( 1 ) and the inner metallic carbon nanotube layer ( 2 ) are selected from carbon nanotube layers of a multi-walled carbon nanotube. These layers are processed into a form suitable for use as the multi-walled carbon nanotube ( 10 ).
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申请公布号 |
US2006205105(A1) |
申请公布日期 |
2006.09.14 |
申请号 |
US20030535927 |
申请日期 |
2003.11.05 |
申请人 |
MARUYAMA RYUICHIRO;ATA MASAFUMI;SHIRAISHI MASASHI |
发明人 |
MARUYAMA RYUICHIRO;ATA MASAFUMI;SHIRAISHI MASASHI |
分类号 |
H01J9/02;H01L21/00;B82B1/00;B82B3/00;H01J1/304;H01L51/30 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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