METHOD AND SYSTEM FOR COATING SECTIONS OF INTERNAL SURFACES

摘要

A method and system for coating the internal surfaces of a localized area or section of a workpiece (10) is presented. Conductive structures (12 and 14) are inserted into one or more openings of a workpiece to define the section to be coated. In some embodiments, a bias voltage (32) is connected to a workpiece section, which functions as a cathode. A gas source (18) and vacuum source (22) are coupled to each conductive structure through a flow control system (48 and 50). The flow control system enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. Only the section encompassed by the conductive structures is coated. When the coating process is completed, a means for varying the conductive structures along the length is utilized to move onto the next section to be coated.