| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a direct-acting guide device which is arranged in a vacuum, has a heat generating part such as a motor moving with a work table, which efficiently cools heat generated in the heat generating part moving in the vacuum, prevents a temperature rise at a periphery of the heat generating part and in which an original function of the device such as measuring precision and positioning precision is not damaged by using a loop narrow tube whose degree of deformation freedom is large and is superior in heat transmission performance is used for cooling of the heat generating part with a simple structure. <P>SOLUTION: In the direct-acting guide device, a guide mechanism moving the work table in a prescribed direction by a driving motor is installed in a vacuum tank. The device has the heat generating part such as the driving motor and a heat dissipation part for removing heat generated in the heat generating part to an external part of the vacuum tank. The heat generating part and the heat dissipation part are coupled by the loop narrow tube. One end of the loop narrow tube is brought into contact with the heat generating part so that heat can be exchanged. The other end is brought into contact with the heat dissipation part so that heat can be exchanged. A heat transmission path is constituted by an operation medium circulating inside the loop narrow tube. Heat generated in the heat generating part is transmitted to the heat dissipation part and heat is radiated to the external part. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
