| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a displacement sensor device for preventing breakage, due to the collision of a cone part by detecting inherent movement of the cone part, and to provide its manufacturing method and a displacement sensor. <P>SOLUTION: In the displacement sensor device, a piezo-resistive part of a movable member has flexibility, a whisker is formed on a part facing the cone part of a fixing member, and the fixing member has resistance to heat. The whisker is an oxide, containing Al, Cr, Mn and the like. The fixing member has a melting point of 1,400°C or higher. After the whiskers are formed, cutting oil is supplied, after water has been absorbed in a whisker layer, machining is performed, and the fixing member is molded to manufacture the displacement sensor device. The displacement sensor is provided in a housing with the displacement sensor device evacuated. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
