| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting apparatus and an inspecting method, capable of improving reliability of an inspection, automating a judgment of the existence of a defect, and making the inspection speeded up. SOLUTION: The inspecting apparatus 1 which inspects a circumferential surface in a rotation direction of a cam 7 being an object to be inspected, has a sensor head 19 equipped with a sensor for acquiring three-dimensional information of the surface of the cam 7. The sensor head 19 is made up movably up and down through a Z-axis vertical drive motor 16 such that the sensor is always perpendicular to the surface of the cam 7 while accompanying the rotation of the cam 7. COPYRIGHT: (C)2006,JPO&NCIPI
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