摘要 |
PROBLEM TO BE SOLVED: To form thin films having high flatness in fine spaces, such as bank openings, constituting the pixels of an EL device or the like. SOLUTION: When a diphenyl ether derivative is used as a solvent, coating films having small meniscus curvatures can be formed. Thereby, the thin films having high flatness can be formed. COPYRIGHT: (C)2006,JPO&NCIPI
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