| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean booth suppressing the turbulence of an air current in the inside to the utmost and capable of realizing uniform down flow with a simple structure. SOLUTION: The clean booth 1 comprises a booth main body 4 having a frame-like ceiling face and a peripheral wall, and an air cleaner 5 placed on the upside of the ceiling face wherein the air cleaner 5 includes a plurality of drive units 13 having a fan, a filter unit 12 through which air supplied from the drive units 13 passes and a connection member 14 for connecting the drive units 13 and the filter unit 12 therebetween, and wherein the filter unit 12 is fixed on the frame-like ceiling face and the roughly whole ceiling face is provided as a clean air outlet. COPYRIGHT: (C)2006,JPO&NCIPI
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