发明名称 |
Interferometric apparatus for measuring shapes |
摘要 |
To provide an optical image measuring apparatus capable of calculating an intensity of a direct current component composed of background light based on a result obtained by detection of interference light and obtaining a signal intensity of the interference light using the calculated intensity. The apparatus includes: an optical interference system to divide a light beam into signal light and reference light, and the signal light propagating through an object to be measured and the reference light are superimposed to produce interference light; beam splitters for dividing it into three interference light beams; shutters to perform sampling; photo detectors for detecting the sampled interference light beams and converting them into electrical signals; and a signal processing portion for calculating the signal intensity of the interference light and the spatial phase distribution thereof based on the electrical signals. |
申请公布号 |
EP1568963(A3) |
申请公布日期 |
2006.09.13 |
申请号 |
EP20050003800 |
申请日期 |
2005.02.22 |
申请人 |
KABUSHIKI KAISHA TOPCON |
发明人 |
CHAN, KINPUI;AKIBA, MASAHIRO;FUKUMA, YASUFUMI;OTSUKA, HIROYUKI;TSUKADA, HISASHI |
分类号 |
G01B9/02;G01B11/24;G01J9/02;G01N21/17 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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