Capacitor arrangement and its manufacturing process

摘要

The capacitor has two substrate discs (1). A capacitor electrode (3) is applied on the surface of each disc. The substrate discs are connected to each other by bulge structures located on both sides of the capacitor electrodes, in such a manner that the electrodes lie opposite each other and form a capacitor. The spacing (d) of the capacitor electrodes is established only by the height of the bulge structures. Measurement connections (5) are arranged on a substrate disc, to measure the capacitance. A bulge structure consists of two bulge elements (4) soldered together, which are arranged on opposite sides of the substrate discs. The substrate discs may be made of glass or a semiconductor material, especially silicon.