发明名称 |
Method and apparatus for charged particle beam exposure |
摘要 |
A plurality of circuit patterns are written by a small number of charged particle beams with a high dimension controllability without using a mask. A desired charge quantity is irradiated on a desired point on a sample by performing irradiation on a charged particle beam section in a superposing manner in order to obtain a predetermined exposure intensity by the charged particle beams constituting a plurality of charged particle beam groups. In addition, the charged particle beams are used, in which current quantities of a plurality of the charged particle beams are made to have a weighted gradation, the desired charged quantity is irradiated, and thus a desired exposure dimension is obtained. |
申请公布号 |
EP1180784(A3) |
申请公布日期 |
2006.09.13 |
申请号 |
EP20010119151 |
申请日期 |
2001.08.08 |
申请人 |
HITACHI, LTD. |
发明人 |
NAGATA, KOJI;YODA, HARUO;SATOH, HIDETOSHI;TAKAHASHI, HIROYUKI |
分类号 |
G03F7/20;H01J37/302;H01J37/147;H01J37/305;H01J37/317;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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