发明名称 Semiconductor device and manufacturing method thereof
摘要 The semiconductor device includes a pad electrode (11) formed on a silicon die (10A). A glass substrate (13) is bonded to the top surface of the silicon die. A via hole (17,20) filled with a conductive material is formed through the silicon die and extended from the back surface of the silicon die to the pad electrode. A bump electrode (23) is electrically connected to the filled via hole. An independent claim is also included for a semiconductor device manufacturing method.
申请公布号 EP1408547(A3) 申请公布日期 2006.09.13
申请号 EP20030023195 申请日期 2003.10.13
申请人 SANYO ELECTRIC CO., LTD. 发明人 TAKAO, YUKIHIRO
分类号 H01L23/48;H01L21/60;H01L23/31;H01L23/485;H01L27/146;H01L27/148 主分类号 H01L23/48
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