| 摘要 |
PROBLEM TO BE SOLVED: To measure the number of foreign matters caused by flaw by counting foreign matters in a 1st area encircled with a 1st line and counting foreign matters in a 2nd area positioned around the 1st area. SOLUTION: The positions of foreign bodies on a semiconductor water are previously found. The number X1 of all foreign matters positioned at the part encircled with a 1st circle 110 having a radius (a) having its center at a point 111 in an area 100 in counted. The number X2 of all foreign matters positioned at the part encircled with a 2nd circle 120 with a radiun (b) which comes into contact with the 1st circle 110 is counted. Further, the numbers X3, X4, X5... of all foreign matters which are encircled with 2nd circles 130, 140, 150... moved so as to touch the circumference of the 1st circle 110 and are not counted yet are counted. When the sum of the number X1 of the foreign matters and the number SX1 (=X1+X3+X4+X5∼) of foreign matters is large than a predetermined value, it is considered that those foreign matters crowd and it is decided that they are foreign matters caused by flaw. |
