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发明名称
METHOD AND APPARATUS FOR SEASONING SEMICONDUCTOR APPARATUS OF SENSING PLASMA EQUIPMENT
摘要
申请公布号
EP1700333(A1)
申请公布日期
2006.09.13
申请号
EP20040808517
申请日期
2004.12.21
申请人
ADAPTIVE PLASMA TECHNOLOGY CORPORATION
发明人
SONG, YEONG SU;OH, SANG RYONG;KIM, S. K.;KIM, N. H.
分类号
H01L21/3065;G01N21/68;H01L21/311;H01L21/66
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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