发明名称 |
Optical element, lithographic apparatus comprising such optical element and device manufacturing method |
摘要 |
An optical element includes a top layer which is transmissive for EUV radiation with wavelength in the range of 5-20 nm, and a structure of the top layer is a structure having an rms roughness value equal to or larger than lambda/10 for spatial periods equal to or smaller than lambda/2. The structure promotes transmission through the top layer to the optical element. |
申请公布号 |
KR100620983(B1) |
申请公布日期 |
2006.09.13 |
申请号 |
KR20040089612 |
申请日期 |
2004.11.05 |
申请人 |
|
发明人 |
|
分类号 |
G02B5/02;G02B1/11;G02B5/00;G02B5/08;G03F7/20;H01L21/027 |
主分类号 |
G02B5/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|