摘要 |
A fixing structure for fixing a rotor shaft to a rotating body capable of maintaining a rotating balance between the rotor shaft and the rotating body to prevent oscillation from occurring by stabilizing the contact state of the contact surface of the rotor shaft on the contact surface of the rotating body and a turbo molecular pump having the fixing structure. A rotor shaft (213) side connection surface (257) in contact with the rotating body (103) is concentrically formed on the upper surface outer peripheral part of the connection part (253). Also, a countersunk part (259) having an upper surface recessed from a connection surface (257) is formed on the inner periphery of the connection surface (257). When the rotor shaft (213) is connected to the rotating body (103), a clearance (265) is formed by an amount equal to the depth of the countersunk part (259) between the rotor shaft (213) and the contact surface (187) of the rotating body (103) in the portion of the rotor shaft (213) in which the countersunk part (259) is formed.
|