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发明名称
摘要
申请公布号	JP3821079(B2)	申请公布日期	2006.09.13
申请号	JP20020277506	申请日期	2002.09.24
申请人		发明人
分类号	G02F1/1343;H05K3/10;H01L21/28;H01L21/288	主分类号	G02F1/1343
代理机构		代理人
主权项
地址

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