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发明名称
COLD CATHODE ION GAUGE
摘要
申请公布号
EP1700093(A2)
申请公布日期
2006.09.13
申请号
EP20040816049
申请日期
2004.12.17
申请人
FEI COMPANY
发明人
LIU, KUN
分类号
G01L21/30;G01L21/34
主分类号
G01L21/30
代理机构
代理人
主权项
地址
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