| 摘要 |
Device for writing and reading a data including a floated cantilever part connected to a support, a resistively heated tip at an end of the cantilever part, and a piezoelectric sensor formed on the cantilever part, thereby preventing an occurrence of a sensing error by reading a data and reducing power consumption by using a piezoelectric sensor, and tip wear by making heights of the cantilever array uniform by using piezoelectric actuators. |
