发明名称 |
Method and system for controlling focused ion beam alignment with a sample |
摘要 |
A method for calibrating operational parameters of a charged particle beam device comprises generating a plurality of distinct spots on a specimen, each spot being generated in response to adjusted operational parameters of the charged particle beam device, and registering said respective operational parameters.
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申请公布号 |
US7105843(B1) |
申请公布日期 |
2006.09.12 |
申请号 |
US20050140017 |
申请日期 |
2005.05.27 |
申请人 |
APPLIED MATERIALS, ISRAEL, LTD. |
发明人 |
PEARL ASHER |
分类号 |
G01N1/00;G21G5/00;H01J37/244;H01J37/302 |
主分类号 |
G01N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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