发明名称 Interferometer and interferance measurement method
摘要 There is provided an interferometer for measuring a surface shape of an optical element using interference, including a reference wave-front generating unit for generating a reference wave front for measuring the surface shape, which is provided in a target optical path, and includes an Alvarez lens.
申请公布号 US7106455(B2) 申请公布日期 2006.09.12
申请号 US20020091985 申请日期 2002.03.06
申请人 CANON KABUSHIKI KAISHA 发明人 SUZUKI AKIYOSHI;SEKINE YOSHIYUKI
分类号 G01B9/02;G01B11/24;G01B11/255 主分类号 G01B9/02
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