发明名称 Testing system and testing method for DUTs
摘要 A device characteristic testing system for testing a first DUT (device under test), a second DUT, a third DUT and a fourth DUT on a wafer, each of the DUTs includes a first end and a second end, the device characteristic testing system includes: a device characteristic testing circuit formed on the wafer includes a first conducting line connected to the second end of the first and the fourth DUT, a second conducting line connected to the second end of the second and third DUTs, a third conducting line connected to the first end of the first and second DUTs, a fourth conducting line connected to the first end of the third and fourth DUT, and a plurality of testing pads respectively coupled to the first, second, third, and fourth conducting line for receiving at least one testing signal to detect device characteristics of the DUTs.
申请公布号 US7106083(B2) 申请公布日期 2006.09.12
申请号 US20040905339 申请日期 2004.12.29
申请人 UNITED MICROELECTRONICS CORP. 发明人 ZHOU JING-RONG
分类号 G01R31/26 主分类号 G01R31/26
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