| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of spontaneous light emitting element capable of improving weathering property of the spontaneous light emitting element. <P>SOLUTION: The manufacturing method of the spontaneous light emitting element, formed by forming a lower electrode on a substrate, laminating a plurality of film layers including light emitting layer on the lower electrode, and forming an upper electrode on the film layers, comprises a first layer forming process forming the first layer on the surface of the lower electrode in vacuum, a heating process applying a heat treatment to a substrate on which the first layer is formed in vacuum, and a second layer forming process forming the second layer on the surface of the first layer in vacuum after the heating process. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
