| 摘要 |
FIELD: measuring equipment engineering. ^ SUBSTANCE: condensation hygrometer contains a layer of oxidized porous silicon on mono-crystalline substrate, a system of opposite-pin electrodes and metallic contacts to it. Pores in oxidized porous silicon have conical shape, expanding towards surface, while electrodes, isolated by oxide, are made of poly-silicon and are embedded into body of mono-crystalline substrate for whole thickness of porous layer. ^ EFFECT: provision of possible operation at high temperatures, increased sensitivity during operation at high temperatures, increased resistance to effect of high temperatures and thermo-cycling. ^ 1 dwg |
