| 摘要 |
PROBLEM TO BE SOLVED: To improve adhesive precision between the transfer master and a transferred body. SOLUTION: When an actually measured line D1 of the surface shape of an uneven pattern side, an inner peripheral side fitting line F1 within a specific range and outer peripheral side fitting line F2 are obtained, the inner peripheral side satisfies x1/α1≤1.0 or x1/α1>1.0 and y1≤5μm when the shift direction is +. When the shift direction is -, x1/α1≤0.5 or x1/α1>0.5 and y1≤0.5μm are satisfied. The outer peripheral side satisfies x2/α2≤2.0 or x2/α2>2.0 and y2≤10μm when the shift direction is +. When the shift direction is -, x2/α2≤1.0 or x2/α2>1.0 and y2≤1.0μm are satisfied. (The shift direction:the lower direction is + for the shift direction of D1 from F1(F2). Note that x1(x2): the distance between the peripheral end and the matched point of D1 and F1(F2),α1(α2): the distance between the peripheral end and the uneven pattern formed end and y1(y2): the amount of shift between D1 and F1(F2) at the formed end of the uneven pattern). COPYRIGHT: (C)2006,JPO&NCIPI
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