BLADE APPLICATION APPARATUS AND BLADE APPLICATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a blade application apparatus and a blade application method which prevent the mixing of air into a coating liquid, suppress the waste of the coating liquid to be applied and consequently achieve efficient application. SOLUTION: The blade application apparatus is provided with: a coating liquid supply part for supplying the coating liquid; a mask member having an opening formed to expose the upper surface of a flat substrate when the mask member is arranged on the flat substrate; and a long sized applying member arranged in the upper surface side of the mask member and for applying the coating liquid supplied by being driven in parallel to the upper surface onto the exposed flat substrate from the opening. A groove part for storing the excess coating liquid and a wall part erected along the groove part are formed on the mask member and a projecting part for regulating the overflow of the coating liquid from the wall part when the coating liquid is raked in the groove part by the coating member is provided on the side surface of the wall part. COPYRIGHT: (C)2006,JPO&NCIPI