| 摘要 |
A gate valve ( 20 ) for a semiconductor processing system includes a housing ( 21 ) forming a plurality of passages ( 22 A to 22 D) arrayed in a first direction. The passages respectively have ports ( 23 A to 23 D) facing a first predetermined side in a second direction perpendicular to the first direction. The ports are respectively provided with valve seats ( 25 A to 25 D) at gradually set back positions in the second direction, as being closer to a second predetermined side in the first direction. Valve plates ( 24 A to 24 D) are arrayed in the second direction to open/close the ports. The valve plates are slid by an actuating mechanism ( 30 A to 30 D).
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