发明名称 |
Method and system for coating internal surfaces using reverse-flow cycling |
摘要 |
A method and system for coating the internal surfaces of a workpiece is presented. A bias voltage is connected to a workpiece, which functions as a cathode. A gas source and a vacuum source are coupled to each opening through a flow control system. The flow control system is capable of a first mode which enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. The flow control system also has a second mode which enables a first opening to function as a vacuum exhaust and a second opening to function as a gas inlet. The cycling may also be used to coat internal surfaces of a workpiece with a single opening. Cycling the flow control system between the first mode and second mode is performed until a uniform coating along the internal surfaces of the workpiece is achieved.
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申请公布号 |
US2006198965(A1) |
申请公布日期 |
2006.09.07 |
申请号 |
US20050074252 |
申请日期 |
2005.03.07 |
申请人 |
TUDHOPE ANDREW W;BOARDMAN WILLIAM J;MERCADO RAUL D;CONTRERAS FREDERICK |
发明人 |
TUDHOPE ANDREW W.;BOARDMAN WILLIAM J.;MERCADO RAUL D.;CONTRERAS FREDERICK |
分类号 |
C23C16/00;H05H1/24 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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