| 摘要 |
A test apparatus for integrated circuits includes a data collector ( 1 ). The data collector includes a cantilever ( 10 ) and at least one probe ( 20 ). The probe is formed at a free end ( 18 ) of the cantilever and includes at least one carbon nanotube ( 22 ). A method for manufacturing the test apparatus for integrated circuits includes the steps of: (a) forming a substrate ( 12 ) at a free end of a cantilever; (b) forming at least one electrically conductive film ( 14 ) on the substrate; (c) depositing at least one catalyst film ( 16 ) on the corresponding electrically conductive film; and (d) depositing at least one carbon nanotube on each catalyst film thereby forming at least one probe thereat.
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