摘要 |
A fluid-operated valve comprises a first valve chamber ( 16 ) and a second valve chamber ( 25 ) communicating with each other through a through-hole ( 21 ), a first cylinder chamber ( 39 ) formed adjacent to the first valve chamber ( 16 ) and accommodating a first piston ( 6 ) so as to be slidable therein, a valve body ( 3 ) positioned in the second valve chamber ( 25 ) and adapted to come into contact with or move away from a valve seat ( 22 ) around the through-hole ( 21 ), a valve stem ( 4 ) having one end connected to the first piston ( 6 ) and the other end connected to the valve body ( 3 ), and an annular diaphragm ( 8 ) having an inner peripheral portion fixed to the valve stem ( 4 ) and an outer peripheral portion fixed to the inner peripheral surface of the first valve chamber ( 16 ). The first piston ( 6 ) is urged by a spring ( 9 ) to bring the valve body ( 3 ) into contact with the valve seat ( 22 ). The first piston ( 6 ) is moved by supplying the working fluid into the first cylinder chamber ( 39 ) through the working fluid supply port of a first cylinder ( 5 ) to move the valve body ( 3 ) away from the valve seat ( 22 ).
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