METHOD FOR OPTIMIZING ILLUMINATION AS TO FULL CHIP LAYER, PROGRAM PRODUCT, AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide optimization of illumination as to a full chip layer.

SOLUTION: A pitch frequency of the full chip layer is found and a pitch frequency histogram of the full chip layer is generated. The pitch frequency indicates how frequent a given pitch occurs in the full chip layer. The pitch frequency histogram is made uniform so as to be a first eigenfunction from the total representation of a coherent system of conversion cross coefficients. By solving an integral expression as to the first eigenfunction of the conversion cross coefficients, the optimized illumination for image-forming the full chip layer is defined.

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