| 摘要 |
<P>PROBLEM TO BE SOLVED: To effectively shield the radiation heat from an exothermic heat source so that the thermal expansion heat to a sheet film can be effectively suppressed and to perform, for example, optical processing (for example, optical transfer, exposure, etc., of an image) to the sheet film with high accuracy. <P>SOLUTION: The work conveyor 18 of an exposing device 10 has an exposure stage 36 having a work placement surface 34 on which the sheet film 32 is placed and which positions and holds the sheet film 32, a lifting mechanism 38 which moves and drives the exposure stage 36 in a vertical direction, a moving stage 40 which moves and drives exposure stage along guide rails disposed on a surface plate 14, and a moving mechanism 42 for moving and driving the moving stage 40. A heat shielding member 80 is mounted on a part of an under surface (the surface opposite the moving stage 40) of the exposure stage 36. In this embodiment, the heat shielding member 80 is mounted on the peripheral portion of the under surface of the exposure stage 36. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
