发明名称 TRANSPARENT ELECTRODE AND MANUFACTURING METHOD OF TRANSPARENT ELECTRODE
摘要 PROBLEM TO BE SOLVED: To provide a transparent electrode, and a manufacturing method of the transparent electrode, excellent in etching properties, and enjoying a low resistance value, high transmittance, and excellent surface smoothness. SOLUTION: The transparent electrode has transparent high-refractive-index layers and metal particles alternately laminated on a transparent base material with a total film thickness of 30 nm or more and 100 nm or less, a surface resistance value of 1Ω/sq. or more and 13Ω/sq. or less. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006236747(A) 申请公布日期 2006.09.07
申请号 JP20050048682 申请日期 2005.02.24
申请人 KONICA MINOLTA HOLDINGS INC 发明人 KIYOMURA TAKATOSHI;KUDO KAZUYOSHI;SAITO ATSUSHI
分类号 H01B5/14;C23C16/40;H01B1/08;H01B13/00;H01L21/28;H01L21/285;H01L21/288 主分类号 H01B5/14
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