| 摘要 |
A three-dimensional structure analyzing system, which improves the energy resolution significantly, achieves low energy analysis, and allows the composition of a sample surface to be known with high accuracy. The three-dimensional structure analyzing system includes: an ion gun for irradiating at least a part of a sample with an ion beam thereby to machine the sample three-dimensionally; an electron gun for irradiating the sample three-dimensionally machined by the ion beam with electrons; an X-ray detector for detecting X-rays from the sample irradiated with electrons; and a composition analysis device for making a composition analysis of the sample based on a result of the detection by the X-ray detector. The X-ray detector is an energy dispersive superconducting X-ray detector.
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