发明名称 THIN FILM TRANSISTOR, AND METHOD OF FABRICATING THIN FILM TRANSISTOR AND PIXEL STRUCTURE
摘要 A thin film transistor and method of fabrication a thin film transistor and a pixel structure are provided. First, a gate is formed on the substrate. Then, a gate-isolating layer is formed on the substrate to cover the gate electrode. After that, a source/drain is formed on the gate-isolating layer and exposes a portion of the gate-isolating layer above the gate electrode. Then, a channel is formed on the portion of the gate-isolating layer above the gate. The source/drain layer is formed before forming the channel to prevent the channel from over etching as forming the source/drain layer. Therefore, the yields of manufacturing thin film transistor and pixel structure can be improved.
申请公布号 US2006199314(A1) 申请公布日期 2006.09.07
申请号 US20050906684 申请日期 2005.03.02
申请人 CHEN CHIUN-HUNG;LEE YU-CHOU 发明人 CHEN CHIUN-HUNG;LEE YU-CHOU
分类号 H01L21/84 主分类号 H01L21/84
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