| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alignment device supporting a load by dispersing the same and capable of moving a table smoothly into XYθ direction while permitting to retain the position of the table even when an external force is applied on the table. <P>SOLUTION: In the alignment device for positioning the table 4 for mounting an objective matter at a predetermined position through a driving mechanism arranged on a machine base unit 7, the driving mechanism is provided with two sets of parallel moving devices having a linear guide and moving in parallel advancing directions while being arranged as staggered with each other, and one set of rotary moving device having a bearing 23 for supporting rotably about a central axis whereat two sets of parallel moving devices are staggered, and one set of rotating and moving device moved into the rotating direction and which are piled in vertical direction. In this case, the two sets of parallel moving devices are respectively provided with a motor control device constituted of a linear motor 1L, a detecting means 2 and a controller 3 while two sets of two axes driving parallel rotating mechanisms 6 consisting of two sets of parallel moving devices and one set of rotary moving device are provided between the machine base 7 and the table 4. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
