| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser irradiation device capable of preventing degradation of a transfer layer, and performing excellent transfer even in a portion having a step therein in a transfer step using LITI (Laser Induced Thermal Imaging). <P>SOLUTION: The laser irradiation device includes a laser generator 211 for patterning, and a laser generator 212 for preheating. Degradation of a transfer layer 153 can be prevented by using laser beams 240 of high intensity generated from the laser generator 211 for patterning, and advantageously, transfer can be excellently performed without occurrence of any edge open failure even in a portion having a step of an acceptor substrate 160 by preheating the portion with laser beams 245 generated from the laser generator 212 for preheating. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
