| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problems of a lamp of a light irradiation means for a light irradiation apparatus that this light irradiation apparatus cannot cope with change of the wavelength of required light and that its life is short, to solve the problem of a shutter mechanism that a comparatively complicated shutter mechanism is required and costs for manufacturing is comparatively high and that the atmosphere near a supporting means for supporting an object to be irradiated is heated through the shutter mechanism to be raised in temperature even if the shutter mechanism is set to be in a light shielding state, and to solve the problem that the object to be irradiated is irradiated intensively with light from the light irradiation means to excessively heat the object to be irradiated. <P>SOLUTION: As a lamp 32 for the light irradiation means 28, a super-high pressure mercury lamp is used. The light irradiation means is selectively positioned at an acting position or a non-acting position. Moreover, the object to be irradiated is irradiated with the light from the light irradiation means through a light diffusion means 36. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
