| 摘要 |
PROBLEM TO BE SOLVED: To reduce the manufacturing cost of a liquid crystal display device etc., by providing a TFT array substrate used for the liquid crystal display device etc., with the number of photolithographic processings and the number of photomask which are less than that of conventinal one. SOLUTION: New technique capable of separating a pixel electrode pattern without using a photolithographic process as a subsequent process by forming patterns 10A and 10B which has a new tapered shape and a fine pattern 10C which has a tapered shape relatively close to perpendicularity at the same time at a normal contact hole portion only through one photolithographic process by using a photomask with phase shift effect for a photolithographic process of contact formation using photosensitive acrylic resin 10 is combined with a known four-mask process to provide new technique capable of forming a TFT array substrate for a display device with three photomasks. COPYRIGHT: (C)2006,JPO&NCIPI |
