| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid transfer device with high yield and reliability in a manufacturing stage. SOLUTION: An inkjet head 3 comprises a channel unit 31 where a plurality of individual ink channels are formed, a diaphragm 40 which is formed on the top surface of the channel unit 31, a piezoelectric material layer 41 which is formed on the top surface on the diaphragm 40, and an actuator unit 32 which has a plurality of individual electrodes 16 formed on the top surface of the layer 41 depending on a pressure chamber 10. A plurality of holes 42, which are elongated in the longitudinal direction of the pressure chamber 10, are formed in the area, facing a section between the adjacent pressure chambers 10, of the diaphragm 40, and two ends 42a of the hole 42 are formed in such an arc shape that a radius of curvature is larger than half the width of the hole 42 and that a center angle is larger than an angle of 180°. Additionally, a plurality of holes 43 as large as the hole 42, and ends 43a of the holes 43 are formed in an area facing the holes 42 of the layer 41 and the ends 42a of the holes 42. COPYRIGHT: (C)2006,JPO&NCIPI
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