SIZING METHOD AND DEVICE OF DOUBLE-SIDED POLISHING MACHINE

摘要

PROBLEM TO BE SOLVED: To provide sizing method and device usable for a workpiece without conductivity and displaying highly accurate sizing performance without being substantially affected by wear of polishing cloth.

SOLUTION: An eddy current sensor 22 is provided in a cavity formed on an upper surface plate 11 of a double-sided polishing machine 1 to detect a distance up to an upper surface 151 of a carrier 15. A detected value of the distance up 151 to the upper surface of the carrier 15 detected by the sensor 22 at the beginning of the polishing is stored as an initial value. The distance 151 up to an initial surface of the carrier 15 stored as an initial value and a distance up to the surface of the present carrier 15 are successively compared. When a difference obtained by the comparisons becomes a value fixed in advance, a control device 30 stops the polishing by regarding polishing amount of the workpiece 16 as amount corresponding to the difference.

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