| 摘要 |
PROBLEM TO BE SOLVED: To obtain a specific gravity as an absolute value and to reduce the manhour required for adjustment by setting references. SOLUTION: Prior to processing, pure water of reference temperature is stored in a processing tank 1, a pressure detecting section 24 converts the pressure into a voltage under that state, and a reference voltage is stored in a storage section 26. Subsequently, processing liquid stored in the processing tank 1 is heated to processing temperature, a voltage corresponding to a pressure detected under that state is employed as a processing voltage, and actual specific gravity of the processing liquid is determined based on the processing voltage and the reference voltage at a concentration calculating section 27. Since the actual specific gravity represents a ratio to the reference voltage of that equipment, it has absolute meaning and when the reference voltage is detected between the equipments, it can be utilized for comparing the equipments and an absolute value understandable for the user can be obtained. Furthermore, a common reference can be obtained for respective equipments and manhour required for adjusting each equipment can be reduced. COPYRIGHT: (C)2006,JPO&NCIPI
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