| 摘要 |
PROBLEM TO BE SOLVED: To improve work efficiency of replacing measurement by providing a posture of probe compensation technique proper for the case repeatedly measuring by replacing the objects to be measured. SOLUTION: An apparatus for measuring three dimensional coordinates comprises a probe posture controller, a coordinates setting part, a reference coordinates memory, an angle difference detector and a posture compensation part. The probe posture controller controls the posture of a probe. The coordinates setting part gains the arrangement state of the object to be measured and sets a reference coordinates to be a reference of three-dimensional coordinates values. The reference coordinates memory stores the first reference coordinates set in the first object to be measured. The angle difference detector takes in the second reference coordinates set in the second object to be measured and obtains the angle difference between the first reference coordinates and the second reference coordinates of the reference coordinates memory. The posture compensation part compensates the posture of the probe in accordance with the angle difference controlled for the first object to be measured in the three dimensional measurement of the second object to be measured. COPYRIGHT: (C)2006,JPO&NCIPI
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