| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion beam irradiation device capable of driving a holder in a reciprocating linear motion in a direction crossing a scanning direction ion beams, even without introducing a linear movement into a processing room. SOLUTION: The ion beam irradiation device is provided with an expansion and contraction drive mechanism 124a driving the holder 10 in a reciprocating linear motion by expanding and contracting arms 52, 64, and a circling drive mechanism 126 swinging the mechanism 124a in reciprocation with a circling center axis as a center. It is also provided with a control device controlling the expansion and contraction drive mechanism 124a and the circling drive mechanism 126 so as to satisfy a relation of: L<SB>A</SB>cosθ=L, concerning a circling angleθ, a reference expansion and contraction length L, and an expansion and contraction length L<SB>A</SB>. COPYRIGHT: (C)2006,JPO&NCIPI
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