| 摘要 |
A plasma glow discharge and/or dielectric barrier discharge generating assembly ( 1 ) comprising at least one pair of substantially equidistant spaced apart electrodes ( 2 ), the spacing between the electrodes being adapted to form a plasma zone ( 8 ) upon the introduction of a process gas and enabling passage, where required, of gaseous, liquid and/or solid precursor(s) characterized in that at least one of the electrodes ( 2 ) comprises a housing ( 20 ) having an inner ( 5 ) and outer ( 6 ) wall, wherein the inner wall ( 5 ) is formed from a non-porous dielectric material, and which housing ( 20 ) substantially retains an at least substantially non-metallic electrically conductive material.
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