| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection device capable of specifying easily and exactly a trouble portion when a trouble is generated in inspection of a semiconductor element in an IC or the like, and a method of specifying the trouble for the semiconductor inspection device. SOLUTION: This device/method has a plurality of element devices including a tester for inspecting an electric characteristic of the element, a plurality of electric wires for the inspection for inspecting the elements for connecting electrically the respective element devices in series from the tester to the plurality of element devices, and a trouble specifying electric wire for specifying the element device generating the trouble out of the plurality of element devices for connecting electrically the electric wires for the inspection to the tester in parallel. COPYRIGHT: (C)2006,JPO&NCIPI
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