| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus which can branch a laser beam and irradiate it on a workpiece at a low cost with a simple configuration, and further to provide a method of laser beam machining. <P>SOLUTION: In a multi-mirror 16 arranged on the downstream side in the advancing direction of the laser beam LB-1 radiated from a laser transmitter 14, a plurality of mirrors 18 are arranged along the short side direction of reflecting surfaces 18R at a definite interval such that the elongated lines of reflecting surfaces 18R do not intersect or coincide with each other. The laser beam LB-1, which is one beam before the incidence into the multi-mirror 16, branches to a plurality of laser beams LB-2, which have the same number as the number of the mirrors 18 and are in parallel with each other, after the reflection at the multi-mirror 16. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
