| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring instrument capable of measuring the shape data or physical property data of a sample under an environment controlled from the installation of its sample to its measurement without exposing the sample to the atmosphere. SOLUTION: This surface data measuring instrument includes a cantilever 6 having a microprobe provided to its leading end, a plate 2 for holding the cantilever 6, a sample fixing stand 4 for installing the sample 7, a load locking chamber 1 comprising a housing 3 or the like kept airtight, a displacement detecting mechanism 8 for detecting the displacement of the cantilever 6, a fine adjustment mechanism 18 being a sample moving mechanism for moving the sample 7, an XY coarse adjustment mechanism 19, a hermetically sealed container 17 provided with a Z coarse adjustment mechanism 20, vacuum exhaust mechanism 21 for evacuating the hermetically sealed container 17 and a gas introducing mechanism 22. The load locking chamber 1 is attached to the hermetically sealed container 17. COPYRIGHT: (C)2006,JPO&NCIPI
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