Control of fluid conditions in bulk fluid distribution systems

摘要

An improved bulk fluid distribution system for controlling the pressure of a fluid in a supply line to a semiconductor manufacturing process. The distribution system includes a pump-based engine with either a pressure vessel or a pulse dampener. In the pump-pressure vessel embodiment, a controller monitors the pressure of the fluid in the supply line and adjusts the dispense pressure of the vessel. In the pump-pulse dampener embodiment, the controller monitors the pressure of the fluid in the supply line and adjusts the flow rate of the pump to maintain the pressure in the supply line at a predetermined setpoint.